Submerged micro grinding: a metalworking fluid application ...
[5], while micro drills can be scaled down to 5 μm[6]. There are two types of micro grinding tools: dicing blades and micro pencil grinding tools (MPGTs) [7]. Dicing blades are thin grinding wheels with thicknesses down to 10 μm[8], which are mainly used in the semiconductor industry to cut wafers [9]; recently they have also been used to ...